Introduction to MEMS Design

Introduction to MEMS (Micro-Electro-Mechanical Systems) Design
Course covers: Basic IC/MEMS Fabrication, Deposition, Etching, Surface & Bulk Micromachining, Beams, Gaps, Resonators, Better Approximations: Parallel Plates, Couette Damping, Squeeze Film Damping, Effective Mass, Electrostatic, Electrostatic Pull-in; Thermal Conductivity, Thermal Capacity, Thermal Time Constant, Foundry Processes